X-RAY SENSOR, X-RAY DIAGNOSTIC APPARATUS USING X-RAY SENSOR, AND METHOD OF MAINTAINING VACUUM STATE OF X-RAY SENSOR

PROBLEM TO BE SOLVED: To prolong a service life of a vacuum maintenance member in a body case of an X-ray sensor by providing an active metal film in the body case, which enables detection of the degree of vacuum in the body case and thereby enables appropriate activation of the vacuum maintenance member in the body case.SOLUTION: The X-ray sensor comprises a vacuum-sealed body case including target sections and electron sources sequentially placed so as to face an inner face of an X-ray incident surface of the body case. The X-ray sensor includes in the body case: a vacuum maintenance member; activation means of the vacuum maintenance member; an active metal film detecting the degree of vacuum in the body case; and a control unit determining the degree of vacuum from the active metal film to control the activation means of the vacuum maintenance member and activating the vacuum maintenance member.