NON-ALKALI GLASS, ITS PRODUCTION METHOD, AND GLASS SUBSTRATE FOR FORMING TFT (THIN FILM TRANSISTOR) OF LIQUID CRYSTAL DISPLAY

PROBLEM TO BE SOLVED: To provide a non-alkali glass which has characteristics such as chemical durability, low thermal expansion property, high strain point, low specific gravity and high Young's modulus, has less defects such as foams and is excellent in production stability.SOLUTION: The non-...

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1. Verfasser: HACHITANI YOICHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a non-alkali glass which has characteristics such as chemical durability, low thermal expansion property, high strain point, low specific gravity and high Young's modulus, has less defects such as foams and is excellent in production stability.SOLUTION: The non-alkali glass has: an average thermal expansion coefficient at 30-300°C in the range of (30-35)×10/°C; strain point of at least 670°C; Young's modulus of at least 70 GPa; specific gravity of less than 2.4; liquid phase temperature of less than 1,200°C; temperature showing the viscosity of 10Pa s of less than 1.600°C; and less than 1 mg/cmof the mass decrease after the immersion in an aqueous solution of nitric acid at 50°C having the concentration of 1 mol/L for 50 hr. The glass contains, by mol, 65.0-70.0% of SiO, 9.5-12.5% of AlO, 8.5-11.5% of BO(provided that SiO+AlO+BOis 87.5-90.0 mol%, and BO/(SiO+AlO) is 0.12-0.14), 2.5 to less than 4.0% of MgO, 5.0-10.0% of CaO, 0.1-2.5% of SrO (provided that MgO+CaO+SrO is 10.0-12.5 mol%), and does not substantially contain BaO, ZnO and PbO.