PROBE DEVICE AND CHARGED-PARTICLE BEAM IRRADIATION APPARATUS USING THE SAME

PROBLEM TO BE SOLVED: To provide a method for enabling prevention of charging and reduction of contamination of and damage to a sample surface without a cumbersome operation when tilting a sample table in processing and observation, a method for enabling the same probe to carry out both the charging...

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Bibliographische Detailangaben
Hauptverfasser:	MOTOTANI SO, NAKAMURA ISAMU, SHIROMIZU TATSUYA, KAWASE KAZUMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for enabling prevention of charging and reduction of contamination of and damage to a sample surface without a cumbersome operation when tilting a sample table in processing and observation, a method for enabling the same probe to carry out both the charging prevention method and a micro sampling; and a charged-particle beam irradiation apparatus using the aforementioned functionality.SOLUTION: An edge position control mechanism is introduced to allow a probe edge position to have a degree of freedom when tilting a sample table, and a charging prevention is enabled without breaking or bending the probe. Further, the edge position is fixed to enable the same probe to carry out microsampling.