RESIST PROTECTIVE FILM COMPOSITION FOR IMMERSION EXPOSURE AND METHOD FOR FORMING RESIST PATTERN

PROBLEM TO BE SOLVED: To provide a resist protective film, with which water can sufficiently follow a relatively moving projection lens and an immersion exposure process can be stably carried out.SOLUTION: A resist protective film composition for immersion exposure is provided, comprising a first po...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SHIROTA NAOKO, YOKOKOJI OSAMU
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a resist protective film, with which water can sufficiently follow a relatively moving projection lens and an immersion exposure process can be stably carried out.SOLUTION: A resist protective film composition for immersion exposure is provided, comprising a first polymer having at least one kind of repeating unit selected from a repeating unit (A3) formed by polymerization of a compound expressed by formula (a3) described below, a repeating unit (A4) formed by polymerization of a compound expressed by formula (a4) described below, and a repeating unit (A5) formed by polymerization of a compound expressed by formula (a5) described below. The compounds expressed by (a3): CF=CFO(CF)C(CF)OH, (a4): CF=CFO(CF)C(O)O(CH)C(CF)OH, and (a5): CF=CFO(CF)C(O)OCH(CH)CHC(CF)OH.