EVALUATION APPARATUS FOR SURFACE CHECKUP APPARATUSES AND EVALUATION METHOD FOR SURFACE CHECKUP APPARATUSES

PROBLEM TO BE SOLVED: To provide an evaluation apparatus for surface checkup apparatuses and an evaluation method for surface checkup apparatuses that can reliably evaluate performances of surface checkup apparatuses for checking minute surface defects to make possible appropriate calibration.SOLUTION: A calibration device 30 retreats a ring illumination 11 and a camera 13 of a surface checkup apparatus 10 with their relative positional relationship at the time of checkup maintained as it is to separate them from a checkup face 1a, where a calibration plate 40 is arranged. In this process, the distance from the calibration plate 40 to the ring illumination 11 is kept equal to that from the checkup face 1a to the ring illumination 11. Further, a hole 41 of a level equivalent to minute surface defects of a checkup object is formed in advance in the calibration plate 40. In this state, a surface image of the calibration plate 40 is shot with the camera 13 and the image is processed in the same way as at the time of checkup to ascertain whether or not the hole 41 of the calibration plate 40 is appropriately checked thereby to evaluate the checkup performance of the surface checkup apparatus 10.