DRYING DEVICE AND THERMAL PROCESSING SYSTEM

PROBLEM TO BE SOLVED: To provide a drying device can efficiently drying a coated film while suppressing the increase of a consumption amount of hot air, and a thermal processing system in which the drying device is incorporated.SOLUTION: A substrate 5 on which the coated film is formed by means of a...

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Bibliographische Detailangaben
Hauptverfasser:	KANDA HIROYUKI, YAMAKOSHI JUNICHI, ICHIBE NOBUO, TANAKA IWAO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY SPRAYING OR ATOMISING IN GENERAL TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a drying device can efficiently drying a coated film while suppressing the increase of a consumption amount of hot air, and a thermal processing system in which the drying device is incorporated.SOLUTION: A substrate 5 on which the coated film is formed by means of a coating process is transported from a preheating part 20 to a drying part 40, and is dried. The preheating part 20 does not blow hot air directly from above the substrate 5 on which the coating film just after coating is formed. Instead, the coated film is preheated by infrared radiation and indirect blowing of hot air from below. The drying part 40 promotes the evaporation of a solvent by blowing hot air directly from above and below the preheated substrate 5. Furthermore, the hot air which sequentially passes through three ventilation boxes 25 in the preheating part 20 is guided by an air conduit 35 to upper hot air ejection parts 45 of the drying part 40, and the hot air used to heat the ceramic plates in the preheating part 20 is reused in the drying part 40.