TEMPLATE MARK IDENTIFICATION DEVICE AND PROGRAM

PROBLEM TO BE SOLVED: To extract an alignment mark candidate becoming the reference of alignment of an FPD substrate surely, even when an alignment mark and a similar mark are attached to the FPD substrate.SOLUTION: A template identification device 1 comprises: a camera 10 which captures the image o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: AKIMORI SHINYA, TAMAMOTO JUNICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To extract an alignment mark candidate becoming the reference of alignment of an FPD substrate surely, even when an alignment mark and a similar mark are attached to the FPD substrate.SOLUTION: A template identification device 1 comprises: a camera 10 which captures the image of an alignment mark 15 attached to an FPD substrate 30; an operation unit 3 which performs an operation for registering the alignment mark 15 as a template mark being referred for alignment of the alignment mark 15; a control unit 2 which performs registration of the template mark, and matching of the template mark and the alignment mark 15; and a monitor 11 which displays the content of processing performed in the control unit 2. When registering the template mark, the control unit 2 performs matching for an image captured for registration of the template mark or a region set in the image, and then extracts an alignment mark candidate and displays the candidate on the monitor 11.