THIN FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a thin film solar cell, along with its manufacturing method, being excellent in photoelectric conversion efficiency, capable of preventing degradation in power generation efficiency of a power generation layer which is caused by optical degradation.SOLUTION: The thin film solar cell includes, on a translucent insulating substrate 1, a first electrode layer 2 of transparent conductive material, a first power generation layer 3 which contains an amorphous silicon film for photoelectric conversion, and a second electrode layer 7, in this order. The first electrode layer 2 is divided, in islands, by a first groove 8a, and so arranged as to stride over adjoining cells. The first power generation layer 3 and the second electrode layer 7 are divided respectively, in islands, by a second groove 8b, such that a plurality of solar battery cells C1, being separated to be cells, are arranged. Further, the solar battery cells C1, adjoining each other through the second groove 8b, are electrically connected in series. A hydrogen-contained insulating film 9 is provided to contact to the amorphous silicon film, in which the hydrogen concentration in the film is higher than the amorphous silicon film and hydrogen desorption occurs at the temperature equal to 100°C or lower.