COLD CATHODE DEVICE, AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a cold cathode device arranged so that the temperature of a cold cathode can be increased to remove an adsorbed gas from the cold cathode at the time of evacuating a container for the purpose of increasing the degree of vacuum in a vacuum container of the cold cathode device.SOLUTION: A cold cathode device 1 comprises: a cold cathode 3 operable to emit electrons in response to application of a voltage; a filament 4 operable to heat the cold cathode 3; a conductive supporting shaft 6 operable to support the cold cathode 3; a glass tube 2 serving as a vacuum container in which the cold cathode 3, the heater 4, and the supporting shaft 6 are closed; heater terminals 7a and 7b led out of the glass tube 2, and connected to the filament 4; and a supporting member terminal 7c led out of the glass tube 2, and connected to the supporting shaft 6. The heater terminals 7a and 7b, and the supporting member terminal 7c are electrically independent of one another, and a desired voltage can be applied to the terminals independently and precisely.