ANTENNA CARRIER, ARRAY ANTENNA TYPE PLASMA CVD DEVICE, AND METHOD FOR INSTALLING ARRAY ANTENNA UNIT OF ARRAY ANTENNA TYPE PLASMA CVD DEVICE

PROBLEM TO BE SOLVED: To simplify the maintenance work of an array antenna unit.SOLUTION: An antenna carrier holding the array antenna unit 30 and movable in a vacuum chamber 1 includes: a pair of supports 75a and 75b holding the array antenna unit 30 in such a state as to droop a plurality of pole bolts 51 and 52; and a regulating member 78 suspended between the pair of supports 75a and 75b and positioned along a longitudinal direction matched with the alignment direction of the pole bolts 51 and 52 of the unit 30. The regulating member 78 has an extension part 78a extending to the alignment direction of the pole bolts 51 and 52 of the unit 30, and a movement restriction part 78b which protrudes from the extension part 78a to a direction crossing the longitudinal direction of the extension part 78a and faces the adjacent pole bolts 51 and 52. The movement restriction part 78b is provided in an evacuating manner from the facing side of the pole bolts 51 and 52 by sliding to the direction crossing the longitudinal direction of the extension part 78a.