METHOD FOR MANUFACTURING Sn ALLOY BUMP

PROBLEM TO BE SOLVED: To provide a method for manufacturing a Sn alloy bump in which the composition of the Sn alloy bump can be easily controlled.SOLUTION: The method for manufacturing a Sn alloy bump formed of an alloy composed of Sn and other one or more kinds of metals includes: a step of formin...

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Hauptverfasser: MASUDA AKIHIRO, HATTA KENJI
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creator MASUDA AKIHIRO
HATTA KENJI
description PROBLEM TO BE SOLVED: To provide a method for manufacturing a Sn alloy bump in which the composition of the Sn alloy bump can be easily controlled.SOLUTION: The method for manufacturing a Sn alloy bump formed of an alloy composed of Sn and other one or more kinds of metals includes: a step of forming a Sn layer 4a by electrolytic plating on an electrode pad 3 in a resist opening 2a, the electrode pad being formed on a substrate 1; a step of laminating Sn and an alloy layer 4b by electrolytic plating on the Sn layer 4a; and a step of forming a Sn alloy bump 5 by melting the Sn layer 4a and the laminated alloy layer 4b after removing a resist 2.
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subjects APPARATUS THEREFOR
BASIC ELECTRIC ELEMENTS
CHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
SEMICONDUCTOR DEVICES
title METHOD FOR MANUFACTURING Sn ALLOY BUMP
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