METHOD AND DEVICE FOR PROCESSING OBJECT USING SCANNED LASER BEAM IRRADIATED IN INCLINED ANGLE DIRECTION

PROBLEM TO BE SOLVED: To provide a method and a device for laser processing hardly causing thermal deformation despite processing using a high-output laser light source and capable of improving processing quality and performing processing deeply by preventing the re-deposition of particles as much a...

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Bibliographische Detailangaben
Hauptverfasser:	KIM CHEON MIN, WOO JEOUNG SIK, JEON SANG WOOK
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING GLASS MACHINE TOOLS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY MINERAL OR SLAG WOOL PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM WORKING CEMENT, CLAY, OR STONE WORKING STONE OR STONE-LIKE MATERIALS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and a device for laser processing hardly causing thermal deformation despite processing using a high-output laser light source and capable of improving processing quality and performing processing deeply by preventing the re-deposition of particles as much as possible by securing a path through which generated particles escape from a portion to be processed.SOLUTION: According to the laser processing method, it is possible to efficiently perform the scribing or cutting of an object by scanning laser beams to move using a scanner or a polygon mirror and by irradiating the object in an inclined angle direction.