INJECTION DEVICE, PATTERN FORMATION DEVICE, INJECTION METHOD, AND PATTERN FORMATION METHOD

PROBLEM TO BE SOLVED: To provide a pattern formation technique by which a pattern can be formed on a substrate by injecting a high-viscosity material.SOLUTION: The method comprises the steps of: forming a laminate S by stacking a pressure generating member 42 including camphor as a sublimating material on a surface of a transparent base material 41, and then stacking thereon a layer of metal paste 43 which is a high-viscosity material; positioning the laminate S and a substrate W to be processed to face each other; and heating a portion of the pressure generating member 42 by switching ON and OFF of laser irradiation while moving a laser irradiation part 60 relatively to the substrate W. The portion of the pressure generating member 42 thus heated by laser irradiation produces a pressure wave owing to a rapid cubical expansion resulting from the sublimation of camphor. The metal paste 43 on the pressure generating member is injected toward the substrate W by means of the pressure thus produced, and thus a pattern of the metal paste 43 is formed on a surface of the substrate W.