ARRAY ANTENNA TYPE CVD PLASMA SYSTEM

PROBLEM TO BE SOLVED: To simplify a series of maintenance operations of a plurality of inductively-coupled electrodes 53 including the operations of mounting and dismounting the electrodes 53.SOLUTION: The CVD plasma system comprises: a vacuum chamber 3; a movable guide rail 29 provided on an inner...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	CHISHINA HIROTSUGU, OGAWA HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To simplify a series of maintenance operations of a plurality of inductively-coupled electrodes 53 including the operations of mounting and dismounting the electrodes 53.SOLUTION: The CVD plasma system comprises: a vacuum chamber 3; a movable guide rail 29 provided on an inner wall surface of a ceiling wall 15 of the vacuum chamber 3 movably in up and down directions; a plurality of split holders 41S supported on the movable guide rail 29 movably in left and right directions; and an inductively-coupled electrode 53 extending through a pair of first and second holding holes 45 and 47 in each split holder 41S and held as it is. When moving upward the movable guide rail 29 to a reference rail height position with the plurality of split holders 41S set on the movable guide rail 29, each first antenna-side connector 57 is connected with a first ceiling-side connector 17, and each second antenna-side connector 61 is connected with a second ceiling-side connector 19.