SCRIBER APPARATUS

PROBLEM TO BE SOLVED: To provide a scriber apparatus which forms scribe lines, each of which has adequate depth and serves as a start point of a fracture, even on substrates having high Mohs hardness such as sapphire substrates and silicon carbide substrates.SOLUTION: A scriber apparatus includes wo...

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Bibliographische Detailangaben
1. Verfasser: KUMAGAI SOSUKE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a scriber apparatus which forms scribe lines, each of which has adequate depth and serves as a start point of a fracture, even on substrates having high Mohs hardness such as sapphire substrates and silicon carbide substrates.SOLUTION: A scriber apparatus includes work-piece holding means holding a work-piece and a scriber unit forming a scribe line in the work-piece held by the work-piece holding means. The scriber unit includes a unit housing, a rotation shaft rotatably supported by the unit housing, and a roller scriber attached to a tip of the rotation shaft. The scriber apparatus further includes ultrasonic vibration means applying ultrasonic vibrations to the roller scriber and electric power supply means applying alternating current power to the ultrasonic vibration means.