PROCESS DATA PROCESSING DEVICE AND PROCESS DATA PROCESSING METHOD

PROBLEM TO BE SOLVED: To make highly accurate data analysis possible for even the process data of a manufacturing apparatus whose recipes are changed frequently.SOLUTION: An arithmetic unit 14 divides process data by step number and searches for divided process data to which the operating condition...

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Bibliographische Detailangaben
1. Verfasser:	SHIMIZU KAZUHISA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To make highly accurate data analysis possible for even the process data of a manufacturing apparatus whose recipes are changed frequently.SOLUTION: An arithmetic unit 14 divides process data by step number and searches for divided process data to which the operating condition of reference steps read out from a reference recipe applies, and creates a record table in which the reference step numbers of applicable reference steps and the step numbers of process data are correlated to one another. And, if the order in which reference step numbers in the record table appear matches the order in which reference step numbers in the reference recipe appear, a symbol representing the content of processing by a manufacturing apparatus is added to the process data. As a result, even process data which has been worked on and processed by an altered recipe can be divided by process data whose processing contents are the same providing that the added symbol is used to divide when data is analyzed by the arithmetic unit 14, making it possible to collect an appropriate number of process data for which highly accurate data analysis is possible.