TRANSFER APPARATUS AND WORK-PIECE PICK UP METHOD

PROBLEM TO BE SOLVED: To provide a transfer apparatus which picks up only a work-piece of the top layer, from thin laminated work-pieces, at high speed in a non contact manner.SOLUTION: A transfer apparatus 1 includes: a Bernoulli chuck 12 holding work-pieces 80 in a non-contact manner; a chuck base...

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1. Verfasser: NAKANISHI HIDEAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a transfer apparatus which picks up only a work-piece of the top layer, from thin laminated work-pieces, at high speed in a non contact manner.SOLUTION: A transfer apparatus 1 includes: a Bernoulli chuck 12 holding work-pieces 80 in a non-contact manner; a chuck base 10 to which the Bernoulli chuck 12 is attached; a parallel mechanism robot 3 moving the chuck base 10 in the air; and an air nozzle 20 blowing air to an upper layer part of the work-pieces 80 laminated on a cassette 70 from the lateral side. When the chuck base 20 is moved down from above the laminated work-pieces 80 by the parallel mechanism robot 3 and the work-piece 80 of the top layer, out of the laminated work-pieces 80, is picked up by the Bernoulli chuck 12, the air nozzle 20 starts blowing the air before the Bernoulli chuck 12 starts the absorption.