ION SOURCE, SYSTEM AND METHOD

PROBLEM TO BE SOLVED: To provide an ion microscope having an ion beam with a spot size of 10 nm or less at a surface of a sample using a gas field ion source, and excellent in versatility and long term reliability.SOLUTION: The material and shape of a conductive electrode tip 186 of an ion source ar...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEWIS S FALKUS III, JOHN A NOTTE IV, RANDOLPH G PERCIVAL, RAYMOND HILL, BILLY W WARD, DIRK ADERHOLD, LARS MARCKWORDT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!