ION SOURCE, SYSTEM AND METHOD

PROBLEM TO BE SOLVED: To provide an ion microscope having an ion beam with a spot size of 10 nm or less at a surface of a sample using a gas field ion source, and excellent in versatility and long term reliability.SOLUTION: The material and shape of a conductive electrode tip 186 of an ion source ar...

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Bibliographische Detailangaben
Hauptverfasser:	LEWIS S FALKUS III, JOHN A NOTTE IV, RANDOLPH G PERCIVAL, RAYMOND HILL, BILLY W WARD, DIRK ADERHOLD, LARS MARCKWORDT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an ion microscope having an ion beam with a spot size of 10 nm or less at a surface of a sample using a gas field ion source, and excellent in versatility and long term reliability.SOLUTION: The material and shape of a conductive electrode tip 186 of an ion source are optimized to form an atomic layer with a trimer on a surface of the tip, and the tip is allowed to operate in an ultralow temperature condition, so that ionization efficiency with gas helium is improved. Information about a sample is determined by detecting Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions, and additional particles such as photons from the sample.