SUCTION MEMBER, PICKUP DEVICE, AND PICKUP METHOD
PROBLEM TO BE SOLVED: To provide a suction member capable of sufficiently preventing damage of a semiconductor chip due to static electricity and capable of widely adapting to existing semiconductor chips.SOLUTION: A suction member comprises: a suction portion 11 having a contact surface 11a for con...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a suction member capable of sufficiently preventing damage of a semiconductor chip due to static electricity and capable of widely adapting to existing semiconductor chips.SOLUTION: A suction member comprises: a suction portion 11 having a contact surface 11a for contacting a semiconductor chip 20 and side surfaces 11c connected to the contact surface 11a; and a first discharge portion 12 protruding toward an outside direction from one of the side surfaces 11c. |
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