SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To prevent a short circuit between elements arranged adjacent to each other across an element isolation region by embedding a microfabricated trench used for the element isolation region with an insulation film without generating voids thereby to inhibit deterioration in manufa...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NISHITANI JUNICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!