APPARATUS AND METHOD FOR LEAK DETECTION USING HYDROGEN AS TRACER GAS

PROBLEM TO BE SOLVED: To provide a solid, light and inexpensive leak detection apparatus capable of detecting large leak up to 10Pa.m/s at fine sensitivity.SOLUTION: The apparatus for leak detection using hydrogen as tracer gas is connected to a specimen 3. The apparatus includes: a hydrogen sensor...

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Hauptverfasser:	KETAN PATEL, FREDERIC ROUVEYRE
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a solid, light and inexpensive leak detection apparatus capable of detecting large leak up to 10Pa.m/s at fine sensitivity.SOLUTION: The apparatus for leak detection using hydrogen as tracer gas is connected to a specimen 3. The apparatus includes: a hydrogen sensor 2 installed in a low-pressure enclosure 6 and including a MOS transistor configured by covering a diode, a resistor and a gate with a palladium catalyst; pump means 7 connected to the low-pressure enclosure 6; a manometer 9 configured so as to measure pressure in a vacuum line formed by the low-pressure enclosure 6 connected to the pump means 7; and a multi-directional valve 4 having a first port capable of inducing a gas flow containing tracer gas into the vacuum line and a second port capable of inducing neutral gas. By the method, the pressure of the vacuum line can be stabilized to evade fluctuation in hydrogen measurement.