DEVICE AND METHOD FOR MEASURING IMAGE SURFACE
PROBLEM TO BE SOLVED: To provide a device and method for measuring an image surface in which the time to be required for measurement of the image surface formed by a lens unit including at least one lens is shortened without reducing measurement accuracy.SOLUTION: Imaging data is output from an imag...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a device and method for measuring an image surface in which the time to be required for measurement of the image surface formed by a lens unit including at least one lens is shortened without reducing measurement accuracy.SOLUTION: Imaging data is output from an imaging element which images an inspecting chart via the lens unit, and based on the imaging data, a state of the image surface formed by the lens unit is measured by a measurement part. At this time, imaging control signals for designating a plurality of partial areas out of the entire imaging region on the imaging element are output from a control part. Moreover, based on the imaging control signals, the imaging data is output only from pixels disposed in a plurality of areas through a scanning circuit. |
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