WAFER TRANSFER ARM AND WAFER TRANSFER APPARATUS

PROBLEM TO BE SOLVED: To provide a wafer transfer arm and wafer transfer apparatus, capable of facilitating removal of a wafer from a wafer suction section after sucking a wafer under vacuum and completing predetermined wafer transfer.SOLUTION: The wafer transfer arm includes a wafer suction section...

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Bibliographische Detailangaben
1. Verfasser:	IKEDA SEIJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a wafer transfer arm and wafer transfer apparatus, capable of facilitating removal of a wafer from a wafer suction section after sucking a wafer under vacuum and completing predetermined wafer transfer.SOLUTION: The wafer transfer arm includes a wafer suction section that is formed from a non-elastic body and has an opening and a support section that is connected with the wafer suction section and has an intake passage communicating with the opening.