ELECTROSTATIC ATTRACTION DEVICE, EXPOSURE DEVICE, METHOD OF MANUFACTURING DEVICE AND METHOD OF MANUFACTURING ELECTROSTATIC ATTRACTION DEVICE

PROBLEM TO BE SOLVED: To provide an electrostatic attraction device which can be manufactured without using adhesive, and to provide an exposure device, a method of manufacturing a device and a method of manufacturing an electrostatic attraction device.SOLUTION: An electrostatic attraction device 22...

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Bibliographische Detailangaben
1. Verfasser:	HAGIWARA TSUNEYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electrostatic attraction device which can be manufactured without using adhesive, and to provide an exposure device, a method of manufacturing a device and a method of manufacturing an electrostatic attraction device.SOLUTION: An electrostatic attraction device 22 comprises a dielectric member 51 having a first surface 59 including an attraction surface 60 for attracting a reticle R, and a second surface 56 formed on the backside of the first surface 59, and a base 50 having a bonding surface 54 being bonded to the second surface 56 of the dielectric member 51.