APPARATUS AND METHOD FOR EVALUATING LAYERS IN MULTI-LAYER STRUCTURE

PROBLEM TO BE SOLVED: To provide an apparatus for evaluating layers including interlayer gaps in a multi-layer structure.SOLUTION: An apparatus 10 for evaluating layers including interlayer gaps in a multi-layer structure presenting a plurality of edges generally aligned across an axis includes: a s...

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Bibliographische Detailangaben

Hauptverfasser:	LINN JOHN R, JEFFREY G THOMPSON
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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