APPARATUS AND METHOD FOR EVALUATING LAYERS IN MULTI-LAYER STRUCTURE

PROBLEM TO BE SOLVED: To provide an apparatus for evaluating layers including interlayer gaps in a multi-layer structure.SOLUTION: An apparatus 10 for evaluating layers including interlayer gaps in a multi-layer structure presenting a plurality of edges generally aligned across an axis includes: a s...

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Hauptverfasser:	LINN JOHN R, JEFFREY G THOMPSON
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus for evaluating layers including interlayer gaps in a multi-layer structure.SOLUTION: An apparatus 10 for evaluating layers including interlayer gaps in a multi-layer structure presenting a plurality of edges generally aligned across an axis includes: a sensing unit 12 configured to sense at least one parameter; a positioning unit 14 coupled with the sensing unit and configured to move the sensing unit generally along the axis; and a control unit 16 coupled with at least one of the positioning unit 14 and the sensing unit 12. The control unit 16 provides an electrical signal to the sensing unit 12. The control unit 16 monitors changes in the at least one parameter as the sensing unit moves past the plurality of edges. The control unit 16 performs the evaluation based on the changes in the at least one parameter.