MAGNETIC SENSOR
PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of detecting external magnetic fields of a plurality of axes particularly with fewer chips.SOLUTION: A magnetic sensor includes: a plurality of magneto resistance effect elements S1 to S3 which are formed by laminating magnetic layers and no...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of detecting external magnetic fields of a plurality of axes particularly with fewer chips.SOLUTION: A magnetic sensor includes: a plurality of magneto resistance effect elements S1 to S3 which are formed by laminating magnetic layers and non-magnetic layers and exert magneto resistance effects; and a soft magnetic material 3 provided at a non-contact position through each magneto resistance effect element and insulating layer 4. The magneto resistance effect elements S1 to S3 in which the fixed magnetization directions P1 of fixed magnetic layers are directed toward an X1-X2 direction are arranged in plan view at two sides X1-X2 of the soft magnetic material 3, respectively. The magneto-resistance effect elements S1 and S3, and the magneto-resistance effect element S2 have the fixed magnetization directions P1 in a reverse direction to each other. |
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