CLEANING DEVICE AND CLEANING METHOD

PROBLEM TO BE SOLVED: To obtain a cleaning device and a cleaning method that can efficiently remove oil floating on the surface of cleaning water after separated from an object to be cleaned.SOLUTION: The edge E of a liquid surface of the cleaning water W that makes contact with the inner circumfere...

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Bibliographische Detailangaben
Hauptverfasser: KANBE KAZUHIRO, IWAMARU YOSUKE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To obtain a cleaning device and a cleaning method that can efficiently remove oil floating on the surface of cleaning water after separated from an object to be cleaned.SOLUTION: The edge E of a liquid surface of the cleaning water W that makes contact with the inner circumferential surface 18A of a glass ring 18 is higher in the vertical direction than a general part G of the liquid surface. This allows the cleaning water W that has been forced to overflow by additional cleaning water W supplied to a cleaning tub 12 and the oil A floating on the liquid surface of the cleaning water W, to flow into a recovery tube 34. Thus, the oil A floating on the liquid surface effectively flows into the recovery tube 34 to be recovered.