IGZO SINTERED COMPACT AND METHOD FOR PRODUCING THE SAME

PROBLEM TO BE SOLVED: To provide an IGZO sintered compact having a minimal amount of a degenerated surface layer caused by firing.SOLUTION: The IGZO sintered compact is produced by molding a mixture of powders of indium oxide, gallium oxide and zinc oxide and firing the molding obtained. The firing...

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Bibliographische Detailangaben
Hauptverfasser:	ISHIDA HIRONORI, MIYATA NOBORU, FUKAZAWA KENICHI, IGUCHI MASAHITO, ASANO YASUAKI
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an IGZO sintered compact having a minimal amount of a degenerated surface layer caused by firing.SOLUTION: The IGZO sintered compact is produced by molding a mixture of powders of indium oxide, gallium oxide and zinc oxide and firing the molding obtained. The firing is conducted by placing the molding in a container which is closed except a specific opening. Further, the firing is made by spreading the zinc oxide powder in the container. This procedure makes the thickness of a degenerated surface layer, which contains InGaZnOand is formed on the surface upon firing, not greater than 1 mm.