LASER MACHINING METHOD

PROBLEM TO BE SOLVED: To obtain a laser machining method that reduces fusional droolings, crystallization and re-distribution of impurities of a transparent conductive film, and secures sufficient insulation achieved by a narrow width scribed groove to improve power generation efficiency of a solar...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MOTOTANI SO, HOSONO AKIHIKO, KAWASE KAZUMASA, YURA SHINSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To obtain a laser machining method that reduces fusional droolings, crystallization and re-distribution of impurities of a transparent conductive film, and secures sufficient insulation achieved by a narrow width scribed groove to improve power generation efficiency of a solar battery.SOLUTION: In a step of removing part of the transparent conductive film 42 formed on a substrate 5 to be processed, by laser machining, the laser machining method causes an explosion in a hydrogen releasing film 44 underlying the transparent conductive film 42 in the substrate 5 to be processed, by irradiating the substrate 5 to be processed with a laser beam to remove the part of the transparent conductive film 42 together with the hydrogen releasing film 44.