CONTROLLER, LITHOGRAPHIC APPARATUS, METHOD OF CONTROLLING OBJECT POSITION, AND DEVICE MANUFACTURING METHOD

CONTROLLER, LITHOGRAPHIC APPARATUS, METHOD OF CONTROLLING OBJECT POSITION, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an improved control system.SOLUTION: A controller is provided for controlling an actuator system having a plurality of actuators arranged to act on an object. The controller uses a gain balancing matrix to convert a first control signal, representing a set of forces...

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Bibliographische Detailangaben
Hauptverfasser: VAN DE VAL MARYNUS MARY JOHANNES, HOUKES MARTIJN, BUTLER HANS, KAMIDI RAMIDIN IZAIR, VAN DE BIDEWEN JEROEN JOHANN MARTIN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an improved control system.SOLUTION: A controller is provided for controlling an actuator system having a plurality of actuators arranged to act on an object. The controller uses a gain balancing matrix to convert a first control signal, representing a set of forces desired to be provided to the center of gravity of the object, into a second control signal, representing an equivalent set of forces to be provided by the plurality of actuators. The system is further configured such that a first gain balancing matrix is used at a first frequency band and a second gain balancing matrix is used at a second frequency band.