PRESSURE SENSOR ELEMENT AND PRESSURE SENSOR EQUIPPED WITH THE SAME

PROBLEM TO BE SOLVED: To provide a pressure sensor element in which damage of a piezoelectric body to external vibration is hard to occur and which is excellent in durability.SOLUTION: The pressure sensor element is formed by laminating a plate-like electrode 2 and a piezoelectric film 3, and at lea...

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Bibliographische Detailangaben
1. Verfasser:	ASHIHARA YOSHIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a pressure sensor element in which damage of a piezoelectric body to external vibration is hard to occur and which is excellent in durability.SOLUTION: The pressure sensor element is formed by laminating a plate-like electrode 2 and a piezoelectric film 3, and at least one electrode is an electrode 21 having a shape different from that of the other electrode 22. As a result, an oscillatory wave is irregularly reflected and resonance due to the external vibration is suppressed, thereby capable of preventing the piezoelectric film from being damaged due to resonance.