PHYSICAL QUANTITY SENSOR AND PRODUCTION METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide a physical quantity sensor having a stopper structure with higher sticking suppress effect than before, and a production method therefor.SOLUTION: The physical quantity sensor includes a functional layer 9 having a movable part 2 movably supported in a height directi...

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Bibliographische Detailangaben
Hauptverfasser:	KOBAYASHI TOSHIHIRO, UTSU YOSHITAKA, TAKAHASHI TORU, MIYATAKE TORU, YAZAWA HISAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a physical quantity sensor having a stopper structure with higher sticking suppress effect than before, and a production method therefor.SOLUTION: The physical quantity sensor includes a functional layer 9 having a movable part 2 movably supported in a height direction, and a counter member 30 arranged facing the functional layer with a gap therebetween in the height direction. The counter member 30 is provided with stopper parts 46 and 47 at positions facing the movable part for regulating the movement of the movable part in the height direction. The stopper parts are formed of a laminate structure of projection bases 42 and 43, a metal base layer 44 formed on the surface of the projection bases, and an insulating layer 45 formed on the surface of the metal base layer.