LIQUID EJECTION HEAD, LIQUID EJECTION APPARATUS, AND METHOD FOR MANUFACTURING LIQUID EJECTION HEAD
PROBLEM TO BE SOLVED: To obtain a liquid ejection head reduced in manufacturing cost, a liquid ejection apparatus, and a method for manufacturing the liquid ejection head.SOLUTION: A mixed liquid containing zirconium oxide is applied and baked to form a flow path forming substrate 10 including a vib...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To obtain a liquid ejection head reduced in manufacturing cost, a liquid ejection apparatus, and a method for manufacturing the liquid ejection head.SOLUTION: A mixed liquid containing zirconium oxide is applied and baked to form a flow path forming substrate 10 including a vibration plate 13, as compared with the case in which a silicon single crystal substrate is used as the flow path forming substrate 10. Therefore, a step of forming the vibration plate, a step of grinding the silicon single crystal substrate, and a step of forming a mask for etching the silicon single crystal substrate can be skipped, so that a method for manufacturing an inkjet type recording head 1 reduced in manufacturing cost can be obtained. Even when an ink by which the silicon single crystal substrate is invaded is used, a step of forming a protective film for protection from the ink can be skipped because the flow path forming substrate 10 contains zirconium oxide, so that the method for manufacturing the inkjet type recording head 1 reduced in manufacturing cost can be obtained. |
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