OPTICAL IMAGING DEVICE, SYSTEM, AND METHOD

PROBLEM TO BE SOLVED: To provide an optical imaging device having a diaphragm.SOLUTION: An optical imaging device has: a plurality of optical elements arranged in a beam path; a diaphragm having an opening, a first region, and a second region that is extended inside the first region along a radial d...

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Bibliographische Detailangaben
Hauptverfasser:	WILL MARCUS, NGUYEN UY-LIEM, BISCHOFF THOMAS, XALTER STEFAN, MICHAEL MUHLBAUER, KWAN YIM-BUN PATRICK, BEKE HERMANN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an optical imaging device having a diaphragm.SOLUTION: An optical imaging device has: a plurality of optical elements arranged in a beam path; a diaphragm having an opening, a first region, and a second region that is extended inside the first region along a radial direction of the diaphragm; and a storage part. The storage part is arranged outside the beam path of the plurality of optical elements. The diaphragm is movable between a first position in the storage part and a second position in the beam path. The second region is extended outside along a direction vertical to the radial direction of the diaphragm, to the first region.