VAPORIZER

PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, which can obtain a vaporized gas in which a raw material solution is uniformly dispersed, and to provide a method for vaporizing the raw material solution.SOLUTION: The vaporizer comprises: (1) a distribution part 8 which includes a gas introducing port 4 for introducing a pressurized carrier gas 3 to a gas passage, means for supplying the raw material solution 5a to the gas passage, and a gas outlet 7 for sending the carrier gas containing the raw material solution to a vaporization part 22; and (2) the vaporization part 22 which includes a vaporization tube 20 having one end connected to a reaction tube of an MOCVD device and the other end connected to the gas outlet 7 and heating means for heating the vaporization tube 20, and is used for heating and vaporizing the carrier gas containing the raw material solution sent from the distribution part 8. (3) The distribution part 8 has a main body 1 of the distribution part having a cylindrical hollow part, a rod 10 having an outer diameter smaller than an inner diameter of the cylindrical hollow part, and a spiral groove 60 in the side of the vaporizer 22 in the periphery of the rod 10. The rod 10 is inserted in the cylindrical hollow part.