COMPOSITION FOR PRODUCTION OF ZINC OXIDE THIN FILM AND COMPOSITION FOR PRODUCTION OF DOPED ZINC OXIDE THIN FILM

PROBLEM TO BE SOLVED: To provide a composition for production of zinc oxide thin films, which uses an organozinc compound as a starting material, is easily handled because of no ignitability, and can form transparent zinc oxide thin films and group 3B element-doped zinc oxide thin films by heating a...

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Bibliographische Detailangaben
Hauptverfasser: HAGA KENICHI, TOKUTOME KOICHI, INABA KOICHIRO, TOYODA KOJI
Format: Patent
Sprache:eng
Schlagworte:
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