DISK COATING SYSTEM

PROBLEM TO BE SOLVED: To provide a system that has many stations, processes a substrate of a magnetic disk etc., and has a small footprint.SOLUTION: The present invention relates to a disk processing and manufacturing apparatus such that disks move through the system on disk carriers which have proc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TERRY BROOK, MARION CRAIG, FAIRBAIRN KEVIN P
Format: Patent
Sprache:eng
Schlagworte:
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