DISK COATING SYSTEM

PROBLEM TO BE SOLVED: To provide a system that has many stations, processes a substrate of a magnetic disk etc., and has a small footprint.SOLUTION: The present invention relates to a disk processing and manufacturing apparatus such that disks move through the system on disk carriers which have proc...

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Bibliographische Detailangaben
Hauptverfasser:	TERRY BROOK, MARION CRAIG, FAIRBAIRN KEVIN P
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a system that has many stations, processes a substrate of a magnetic disk etc., and has a small footprint.SOLUTION: The present invention relates to a disk processing and manufacturing apparatus such that disks move through the system on disk carriers which have processing chambers stacked thereupon respectively and are adjusted so as to receive disks of various sizes. The disks enters the system through a load zone, and then loaded in the disk carriers. The disks continuously move in the carriers through processing chambers at one level, and move thereafter to the other level by a lift or elevator. At the other level, the disks move continuously through the system and are output thereafter at an unload zone.