EUV COLLECTOR

EUV COLLECTOR

PROBLEM TO BE SOLVED: To provide a collector which improves quality of radiation to illuminate an object field to be transmitted.SOLUTION: An EUV collector (15) for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror (23) for reflecting an emissi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MICHAEL RIGHI, UDO DINGER
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
GAMMA RAY OR X-RAY MICROSCOPES
HOLOGRAPHY
IRRADIATION DEVICES
MATERIALS THEREFOR
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a collector which improves quality of radiation to illuminate an object field to be transmitted.SOLUTION: An EUV collector (15) for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror (23) for reflecting an emission of the EUV radiation source, which is rotationally symmetric with respect to a central axis (24). The EUV collector also includes a cooling device (26) for cooling the at least one collector mirror (23). The cooling device (26) has at least one cooling element (27), which has a course with respect to the collector mirror (23), so that, in each case, the projection of the course into a plane perpendicular to the central axis (24) has a main direction, which encloses an angle b of at most 20° with respect to a predetermined preferred direction (29).