LAMINATE, METHOD FOR MANUFACTURING THE SAME, MANUFACTURING DEVICE AND METHOD FOR MEASURING FILM THICKNESS

PROBLEM TO BE SOLVED: To provide a laminate that can measure a film thickness of each film, and to provide a method for manufacturing the laminate and a method for measuring the film thickness that can inspect the film for failure by performing the film thickness measurement nondestructively and non...

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Bibliographische Detailangaben
1. Verfasser:	ITO KOJIRO
Format:	Patent
Sprache:	eng
Schlagworte:	LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a laminate that can measure a film thickness of each film, and to provide a method for manufacturing the laminate and a method for measuring the film thickness that can inspect the film for failure by performing the film thickness measurement nondestructively and noncontactly.SOLUTION: The laminate is composed of a plurality of layers. An air space is formed in a prescribed position in relation to at least one of the plurality of layers.