ELECTRONICS RACK, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH ELECTRONICS RACK

PROBLEM TO BE SOLVED: To provide an improved cooling mechanism for an electronics rack and an electronics module, e.g., forming part of a lithographic apparatus.SOLUTION: A lithographic apparatus having an electronics module MO1 and an electronics rack in which the electronics module is operationall...

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Bibliographische Detailangaben
Hauptverfasser:	VAN GILS PETRUS JACOBUS MARIA, EDWIN GERARDUS ADRIANUS JOHANNES RENDERS, VAN DEN BRIEL CHRIS PIERRE AUGUSTE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an improved cooling mechanism for an electronics rack and an electronics module, e.g., forming part of a lithographic apparatus.SOLUTION: A lithographic apparatus having an electronics module MO1 and an electronics rack in which the electronics module is operationally housed is disclosed. The electronics rack includes an electrical connector to establish an electrical connection to a mating electrical connector ECM1, ECM2 of the electronics module MO1, and a cooling fluid connector to establish a cooling fluid connection to a mating cooling fluid connector CFCM1, 2 of the electronics module MO1, wherein a direction of insertion of the mating electrical connector substantially corresponds to a direction of insertion of the mating cooling fluid connector.