PROBE UNIT

PROBLEM TO BE SOLVED: To provide a probe unit capable of easily performing a probe replacement.SOLUTION: A probe unit 1 comprises a pair of a plunger holder 30 and a probe holder 40. The plunger holder 30 holds a plurality of plungers 10, and the probe holder 40 holds a plurality of probes 20 corres...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HOSHI MAKOTO, ARAI NOBUHISA, MARUYAMA MAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a probe unit capable of easily performing a probe replacement.SOLUTION: A probe unit 1 comprises a pair of a plunger holder 30 and a probe holder 40. The plunger holder 30 holds a plurality of plungers 10, and the probe holder 40 holds a plurality of probes 20 corresponding to the respective plungers 10. The probes 20 are held in the probe holder 40 so as to approach an inspection object from an inspection object facing surface 44 of the probe holder 40. The probes 20 are not fixed by screws or machine screws, etc. and are placed on a bottom surface of a probe housing recess room 45 with body parts thereof inserted into probe holding holes so that the probe unit 1 enables extremely easy replacement work of probes.