STEAM DRYING METHOD AND STEAM DRYING DEVICE

PROBLEM TO BE SOLVED: To provide a steam drying method capable of preventing the occurrence of a drying failure by exchanging solvent at a proper timing.SOLUTION: The steam drying method is provided for drying an object to be cleaned using steam generated by boiling the solvent. The method includes...

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Bibliographische Detailangaben
Hauptverfasser: TSUJIMURA HARUNA, ATSUMI MOTOHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a steam drying method capable of preventing the occurrence of a drying failure by exchanging solvent at a proper timing.SOLUTION: The steam drying method is provided for drying an object to be cleaned using steam generated by boiling the solvent. The method includes a boiling point measurement step of measuring a boiling point of the solvent, and a solvent exchange step of disposing at least part of the solvent and for supplying a new solvent, when the boiling point reaches a predetermined temperature of not less than a minimum azeotropic temperature of the solvent and water, and of less than the original boiling point.