ROTARY JOINT AND SPUTTERING SYSTEM

PROBLEM TO BE SOLVED: To provide a rotary joint which can be effectively cooled while reducing the device in size.SOLUTION: The rotary joint 200 includes a housing 204 having an insertion hole and an introducing opening 215 for introducing fluid from the outside, a shaft body unit 201 inserted into...

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Bibliographische Detailangaben
1. Verfasser:	YASUMATSU YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINTS OR FITTINGS FOR PIPES LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING METALLURGY PIPES SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a rotary joint which can be effectively cooled while reducing the device in size.SOLUTION: The rotary joint 200 includes a housing 204 having an insertion hole and an introducing opening 215 for introducing fluid from the outside, a shaft body unit 201 inserted into the insertion hole of the housing in order to rotate relatively with respect to a rotary shaft together with the housing, and a switching member 208 which is formed within the shaft body unit along an axial direction and is provided in the middle of first and second shaft body unit introducing paths to communicate with the introducing opening and to switch a flow rate of the fluid. The switching member includes a first hole 209 and a second hole 210 which is smaller than the first hole in diameter and is further smaller than the first and second shaft body unit introducing paths in diameter. The flow rates of the fluid flowing through the first and second shaft body unit introducing paths can be varied by the switching member.