DROPLET DISCHARGE APPARATUS

PROBLEM TO BE SOLVED: To efficiently perform drawing processing and foreign matter detection processing to improve the productivity.SOLUTION: A droplet discharge apparatus includes: a droplet discharge head that discharges a functional liquid as droplets toward a workpiece; a stage which is disposed...

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Bibliographische Detailangaben
1. Verfasser:	OGAWA MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL PERFORMING OPERATIONS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To efficiently perform drawing processing and foreign matter detection processing to improve the productivity.SOLUTION: A droplet discharge apparatus includes: a droplet discharge head that discharges a functional liquid as droplets toward a workpiece; a stage which is disposed on both sides of the droplet discharge head, respectively, in plane view, and on which the workpiece is placed; a scanning part which scans each stage relative to the droplet discharge head; a foreign matter detecting part that detects foreign matters adhering to the workpiece placed on the stage; and a control part that detects, while relatively scanning one stage and the droplet discharge head, foreign matters adhering to the workpiece placed at the other of the stage.