DEFECT DETECTION APPARATUS, DEFECT DETECTION METHOD, DEFECT DETECTION PROGRAM AND RECORDING MEDIUM

PROBLEM TO BE SOLVED: To provide a defect detection apparatus capable of shortening an imaging tact as further as possible when detecting a defect in a plane display panel such as a liquid crystal panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAKANISHI HIDENOBU, TABATA SHINTARO, YAMAMOTO SHUHEI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a defect detection apparatus capable of shortening an imaging tact as further as possible when detecting a defect in a plane display panel such as a liquid crystal panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix shape through pixel displacement.SOLUTION: In a defect detection apparatus 100, based on dimensions Tx and Ty of pixels in first and second array directions X and Y in a liquid crystal panel L of an inspection target and an imaging resolution R of an area sensor 30, a resolution improve magnification Vx for the first array direction X and a resolution improve magnification Vy for the second array direction Y are individually calculated and based on the calculated resolution improve magnifications Vx and Vy, a plurality of imaging positions indicating a relative positional relationship, to be satisfied during imaging, between the liquid crystal panel L and the area sensor 30 are set as many as Vx×Vy. On the basis of captured images which are captured at the imaging positions, a resolution improved image is produced through pixel displacement and on the basis of the resolution improved image, a defect in the liquid crystal panel L is detected.