MANAGEMENT DEVICE FOR SEMICONDUCTOR MANUFACTURING DEVICE, AND COMPUTER PROGRAM

PROBLEM TO BE SOLVED: To provide a management device for a semiconductor manufacturing device, and a computer program, enabling accurate process monitoring based on an obtained pattern image etc.SOLUTION: The management device for the semiconductor manufacturing device includes: a library storing the relationship between pattern shape information at a plurality of positions and exposure conditions of an exposure device; and a calculation device for extracting the exposure conditions by comparing the shape information at the plurality of positions extracted from image information with the shape information stored in the library, and based on logical products in a plurality of exposure condition ranges corresponding to the shape information of the plurality of patterns extracted from the image information. Also, the computer program for executing the above processing is proposed.