FORCE SENSE OR MOTION SENSOR
PROBLEM TO BE SOLVED: To provide a force sense or motion sensor which has high sensitivity and reliability and is manufactured at a low cost with a simpler structure.SOLUTION: The force sense or motion sensor comprises a base 1 which holds and fixes the sensor; a table 30 which is configured so as t...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a force sense or motion sensor which has high sensitivity and reliability and is manufactured at a low cost with a simpler structure.SOLUTION: The force sense or motion sensor comprises a base 1 which holds and fixes the sensor; a table 30 which is configured so as to be sensitive to stress in six degrees of freedom directions and is disposed opposite the base; an operation part which is disposed between the base and the table and operates in response to the stress; a plurality of detecting elements which detect displacement and/or deformation of the operation part; and an arithmetic unit which comprehensively calculates amounts of displacement and or deformation of respective detecting elements. The operation part comprises a plurality of radially arranged sensitive arms 10 and a boss part 25 which is integrated with the arms and is thicker than the arms. |
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